Guideline for Selecting Anisotropic Etchant of Single Crystal Silicon.
نویسندگان
چکیده
منابع مشابه
Lamb waves in an anisotropic plate of a single crystal silicon wafer
Lamb waves are dispersive in a plate and elastic properties of anisotropic materials are dependent on the crystal orientation. It is expected that the wave propagation on a thin anisotropic plate is complex due to dispersion of Lamb waves which will be dependent on the propagation direction. Therefore it is essential to understand elastic waves in an anisotropic plate. In the present work, a si...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1998
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.64.157